It's assumed that occasionally, secondary thermal ALD reactions through the gaseous by-products can cause an apparently much better conformality than may very well be accomplished that has a “pure” plasma system. For instance, experimental movie thickness profiles received for PE-ALD of Al2O3 by Dendooven et al. Great control of ion https://surfacecoating60369.blogpixi.com/20204359/atomic-layer-deposition-for-dummies